Electron source - tungsten or LaB6 electron sources
Detectors - secondary, VP secondary and backscattered electron detectors
X-ray spectrometers - energy and wave dispersion (EDS and WDS) INCA (Oxford Instruments) Vacuum in a sample chamber - high (about 10-3 Pa) and low (5- 2000 Pa).
High tension up to 30 kV
Resolution - 2 nm (LaB6), 3 nm (W) at 15 kV.