Scanning electron microscope Helios NanoLab 650

(FEI, Netherlands, 2011)
Electron source - Schottky type field emission electron source,
Galium ion source - FIB
TEM sample lift-out mechanism - Omniprobe 100.7 (Oxford Instruments)
Platinum deposition and selective carbon mill gas injection systems
Sample cleaners - Cryocleaner and plasma cleaner.
X-ray spectrometer (EDX) - INCAEnergy (Oxford Instruments) with X-Max detector.
ThinFilm ID - software for thin film composition and thickness determination.
High tension – up to 30 kV,
Resolution: 0.8 nm (30-2 kV); 0.9 nm (1 kV); 1.5 nm (200 V).