SCANNING ELECTRON MICROSCOPE
HELIOS NANOLAB 650

Electron source – Schottky type field emission electron source;
Galium ion source – FIB;
TEM sample lift-out mechanism – Omniprobe 100.7 (Oxford Instruments);
Platinum deposition and selective carbon mill gas injection systems;
Sample cleaners – Cryocleaner and plasma cleaner.
X-ray spectrometer (EDX) – INCAEnergy (Oxford Instruments) with X-Max detector.
ThinFilm ID – software for thin film composition and thickness determination.
High tension – up to 30 kV,
Resolution: 0.8 nm (30–2 kV); 0.9 nm (1 kV); 1.5 nm (200 V).