Electron source – Schottky type field emission electron source.
Flexible high tension: 20, 40, 80, 120, 160, 200 kV.
Detector – high angle annular dark field (HAADF),
Energy dispersive x-ray spectrometer – EDAX with r-TEM detector,
CCD camera – 11 MPix ORIUS SC1000B (Gatan);
Specimen holders – single and double tilt.
Sample plasma cleaner.
Resolution (point-line): (0.25-0.102 nm).