Electron source - Schottky type field emission electron source.
Flexible high tension: 20, 40, 80, 120, 160, 200 kV.
Detector - high angle annular dark field (HAADF),
Energy dispersive x-ray spectrometer - EDAX with r-TEM detector,
CCD camera - 11 MPix ORIUS SC1000B (Gatan)
Specimen holders - single and double tilt
Sample plasma cleaner
Resolution (point, line) - (0.25-0.102 nm).